Proceedings of SPIE

3 total works

Laser Applications in Microelectronic and Optoelectronic Manufacturing VI

by Malcolm C. Gower, Henry Helvajian, Koji Sugioka, and Jan J. Dubowski

Published 30 September 2001

MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication

by Henry Helvajian, Siegfried W. Janson, and Franz Laermer

Published 1 October 2001

Fourth International Symposium on Laser Precision Microfabrication

by Inez Miyamoto, Andreas Ostendorf, Koji Sugioka, and Henry Helvajian

Published 1 January 2003