Fourth International Symposium on Laser Precision Microfabrication (Proceedings of SPIE, v. 5063)

by Inez Miyamoto, Andreas Ostendorf, Koji Sugioka, and Henry Helvajian

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  • ISBN10 0819448699
  • ISBN13 9780819448699
  • Publish Date 1 January 2003
  • Publish Status Active
  • Publish Country US
  • Imprint SPIE Press
  • Format Paperback
  • Pages 548
  • Language English