3 books • 1 series
Fourth International Symposium on Laser Precision Microfabrication (Proceedings of SPIE, v. 5063)
MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication (Proceedings of SPIE, v. 4559)
Laser Applications in Microelectronic and Optoelectronic Manufacturing VI (Proceedings of SPIE, v. 4274)