MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication (Proceedings of SPIE, v. 4559)

by Henry Helvajian, Siegfried W. Janson, and Franz Laermer

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  • ISBN10 0819442879
  • ISBN13 9780819442871
  • Publish Date 1 October 2001
  • Publish Status Unknown
  • Publish Country US
  • Imprint SPIE Press
  • Format Paperback
  • Pages 218
  • Language English