Laser Applications in Microelectronic and Optoelectronic Manufacturing VI (Proceedings of SPIE, v. 4274)

by Malcolm C. Gower, Henry Helvajian, Koji Sugioka, and Jan J. Dubowski

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  • ISBN10 0819439525
  • ISBN13 9780819439529
  • Publish Date 30 September 2001
  • Publish Status Active
  • Publish Country US
  • Imprint SPIE Press
  • Format Paperback
  • Pages 516
  • Language English