Graphene and VLSI Interconnects

by Cher Ming Tan, Udit Narula, and Vivek Sangwan

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  • Discusses the method to grow not only graphene over Cu but also allows the reader to know how to optimize graphene growth, using statistical design of experiments, on Cu interconnects in order to obtain good-quality and reliable interconnects
  • Provides the basic understanding of graphene-Cu interaction mechanism
  • Introduces a novel graphene growth process and graphene-assisted electroless copper plating
  • ISBN10 9814877824
  • ISBN13 9789814877824
  • Publish Date 25 November 2021 (first published 24 November 2021)
  • Publish Status Active
  • Publish Country SG
  • Imprint Jenny Stanford Publishing
  • Format Hardcover
  • Pages 116
  • Language English