Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing

by Wei Gao

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  • ISBN10 1282981943
  • ISBN13 9781282981942
  • Publish Date 1 January 2010
  • Publish Status Cancelled
  • Out of Print 12 May 2015
  • Publish Country US
  • Imprint Springer London
  • Format eBook
  • Pages 366
  • Language English