Designed to give a concise but complete overview of the field, this book features contributions written by leading experts in the various areas. Topics include design, materials, film growth, deposition including large area, characterization and monitoring, and mechanical stress.
- ISBN10 3540363866
- ISBN13 9783540363866
- Publish Date 1 July 2003 (first published 5 May 2003)
- Publish Status Active
- Publish Country US
- Imprint Springer
- Format eBook
- Language English