Proceedings of SPIE Series | Bookhype

v. 4593

Cover of Design, Characterization, and Packaging for MEMS and Microelectronics II

Design, Characterization, and Packaging for MEMS and Microelectronics II

by Paul D. Franzon, Ajay P. Malshe, and Francis E H Tay

Published 1 January 2001

v. 4230

Cover of Micromachining and Microfabrication

Micromachining and Microfabrication

by Kevin Chau, M. Parameswaran, and Francis E H Tay

Published 31 March 2001

v. 4936

Cover of Nano- and Microtechnology

Nano- and Microtechnology

by Dinesh K. Sood, Ajay P. Malshe, and Ryutaro Maeda

Published 1 January 2002