Design, Characterization, and Packaging for MEMS and Microelectronics II (Proceedings of SPIE, v. 4593)

by Paul D. Franzon, Ajay P. Malshe, and Francis E H Tay

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  • ISBN10 0819443239
  • ISBN13 9780819443236
  • Publish Date 1 January 2001
  • Publish Status Active
  • Publish Country US
  • Imprint SPIE Press
  • Edition New ed.
  • Format Paperback
  • Pages 332
  • Language English