Nano- and Microtechnology: Materials, Processes, Packaging, and Systems (Proceedings of SPIE, v. 4936)

by Dinesh K. Sood, Ajay P. Malshe, and Ryutaro Maeda

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  • ISBN10 0819447315
  • ISBN13 9780819447319
  • Publish Date 1 January 2002
  • Publish Status Active
  • Publish Country US
  • Imprint SPIE Press
  • Edition New ed.
  • Format Paperback
  • Pages 488
  • Language English