Construction Materials Science and Technology
1 total work
Handbook of Sputter Deposition Technology
by Kiyotaka Wasa and Shigeru Hayakawa
Published 1 January 1992
A concise, comprehensive overview of sputter deposition technologyua key technology for materials research in the next decade.
Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.
Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.