A concise, comprehensive overview of sputter deposition technologyua key technology for materials research in the next decade.
Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.
- ISBN10 6612002824
- ISBN13 9786612002823
- Publish Date 1 January 1992
- Publish Status Active
- Out of Print 2 December 2009
- Publish Country US
- Imprint William Andrew Publishing
- Format eBook
- Pages 316
- Language English