Microsystems Engineering: Metrology and Inspection (Proceedings of SPIE, v. 4400)

by Christophe Gorecki, Werner Jueptner, and Malgorzata Kujawinska

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  • ISBN10 0819440957
  • ISBN13 9780819440952
  • Publish Date 1 October 2001
  • Publish Status Active
  • Publish Country US
  • Imprint SPIE Press
  • Format Paperback
  • Pages 182
  • Language English