Microfabrication Techniques for Polymeric MEMS reviews recent progress made in the field of polymeric microelectromechanical (MEMS) devices, focusing on the fabrication techniques currently in use. The book begins with an overview of polymeric MEMS systems, their applications, the different polymers (photoresists, PMMA, polyimide, PDMS, thermosetting polymers) used, and the more traditional fabrication techniques. It proceeds to cover microstereolithography (MSL), one of the most common rapid prototyping techniques that has greatly reduced fabrication times for MEMS systems. The book concludes with descriptions of recent developments in applications of polymeric MEMS, including those that have gone on to prove commercially successful.
- ISBN10 075030846X
- ISBN13 9780750308465
- Publish Date 15 July 2008
- Publish Status Withdrawn
- Out of Print 4 July 2016
- Publish Country GB
- Publisher Taylor & Francis Ltd
- Imprint Institute of Physics Publishing
- Format Hardcover
- Pages 412
- Language English