Smart Sensors, Actuators and MEMS (Proceedings of SPIE, Vol 5116)

by Jung-Chih Chiao, Vijay K. Varadan, and Carles Cane

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  • ISBN10 0819449768
  • ISBN13 9780819449764
  • Publish Date 30 July 2003
  • Publish Status Active
  • Out of Print 25 November 2013
  • Publish Country US
  • Imprint SPIE Press
  • Edition New ed.
  • Format Paperback
  • Pages 970
  • Language English