6 books • 3 series
Optical Micro and Nano Technology
Micromachining and Microfabrication Process Technology XIV (Proceedings of SPIE, v. 7204)
Introduction to MEMS (Synthesis Lectures on Digital Circuits and Systems)
Micro- and Nanotechnology (Proceedings of SPIE, v. 7269)
Smart Sensors, Actuators and MEMS (Proceedings of SPIE, Vol 5116)
Device and Process Technologies for MEMS and Microelectronics II (Proceedings of SPIE, v. 4592)