The contributions in this volume cover methods for removal of particle contaminants on surfaces. Several of these methods are well established and have been employed in industrial applications for a long time. However, the ever- higher demand for removal of smaller particles on newer substrate materials is driving continuous development of the established cleaning methods and alternative innovative methods for particle removal. This book provides information on the latest developments in this topic area.
- ISBN10 6612738200
- ISBN13 9786612738203
- Publish Date 20 November 2009 (first published 1 January 2009)
- Publish Status Active
- Out of Print 14 September 2011
- Publish Country US
- Imprint Elsevier Science & Technology
- Format eBook
- Pages 312
- Language English