This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.
- ISBN13 9783030232986
- Publish Date 6 August 2019
- Publish Status Active
- Publish Country CH
- Imprint Springer Nature Switzerland AG
- Edition 1st ed. 2019
- Format Hardcover
- Pages 288
- Language English