Frontiers of Characterization and Metrology for Nanoelectronics (AIP Conference Proceedings, #1395) (AIP Conference Proceedings / Materials Physics and Applications, v. 931)

Erik M. Secula (Editor), David G. Seiler (Editor), Rajinder P. Khosla (Editor), Dan Herr (Editor), C. Michael Garner (Editor), Robert McDonald (Editor), and Alain C. Diebold (Editor)

As the semiconductor industry continues to move toward silicon nanoelectronics and beyond, the introduction of new materials, innovative processing and assembly, and novel devices brings formidable metrology challenges. This book emphasizes the frontiers of innovation in the characterization and metrology needed to advance nanoelectronics.

• ISBN10: 0735407126
• ISBN13: 9780735407121
• Publish Date: 26 October 2009 (first published 17 October 2007)
• Publish Status: Active
• Publish Country: US
• Imprint: American Institute of Physics
• Format: Hardcover
• Pages: 320
• Language: English