The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.
- ISBN10 019856287X
- ISBN13 9780198562870
- Publish Date 28 May 1998 (first published 1 January 1998)
- Publish Status Active
- Publish Country GB
- Imprint Oxford University Press
- Format Hardcover
- Pages 356
- Language English