The Science and Technology of Plasma and Vacuum Processing

by Paul Swift, William George Graham, Timo Gans, Philip Gordon Steen, Miles Turner, Kenneth Frances Dunn, and David Vender

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This book presents the fundamental principles of vacuum technology. It introduces the working principles and operating regimes of different vacuum pumps and vacuum sensors and discusses vacuum systems design concepts and trouble-shooting of vacuum problems. Demonstrating the wide range of vacuum application throughout industry, the authors present an overview that familiarizes students with the various parts of a vacuum system and prepares them for specifying and sourcing vacuum systems components and materials.

  • ISBN10 1439818118
  • ISBN13 9781439818114
  • Publish Date 1 February 2011
  • Publish Status Cancelled
  • Publish Country US
  • Publisher Taylor & Francis Inc
  • Imprint CRC Press Inc
  • Format eBook
  • Pages 704
  • Language English