Low-temperature plasma physics is a very active area of research located on the boundaries between physics, chemistry and materials science. Recent technological developments, e.g. in plasma etching or plasma deposition, have led to a revived interest in plasma physics and technology. This volume describes in detail fundamentals and applications of low-temperature plasma physics including newest achievements. The authors of this volume are top scientists from the USA and Europe who present most recent successes in our understanding of how plasmas behave and put a strong focus on the links between theory and experiment or technological process.
- ISBN10 3527288872
- ISBN13 9783527288878
- Publish Date 26 April 2001
- Publish Status Out of Print
- Out of Print 8 October 2008
- Publish Country DE
- Imprint Wiley-VCH Verlag GmbH
- Format Hardcover
- Pages 523
- Language English