Microsystems: Micro-Electro-Mechanical Systems (MEMS)

by Dirk Zielke

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  • ISBN10 1530132649
  • ISBN13 9781530132645
  • Publish Date 20 February 2016 (first published 19 February 2016)
  • Publish Status Active
  • Imprint Createspace Independent Publishing Platform
  • Format Paperback (US Trade)
  • Pages 108
  • Language English