Plasma Etching: Fundamentals and Applications (Series on Semiconductor Science and Technology)

by Minoru Sugawara

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  • ISBN10 1280903732
  • ISBN13 9781280903731
  • Publish Date 1 January 1998
  • Publish Status Active
  • Out of Print 17 February 2015
  • Publish Country US
  • Imprint Oxford University Press, USA
  • Format eBook
  • Pages 347
  • Language English