This book introduces the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies are also discussed and light is shed on the potential applications of microsystems to nano-scale manipulation of matter. The book is a systematic, updated and quite complete treatise of its subject.
- ISBN13 9783211374535
- Publish Date 1 September 2006
- Publish Status Active
- Publish Country AT
- Imprint Springer Verlag GmbH
- Edition 2006 ed.
- Format Paperback
- Pages 211
- Language English