Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon (Materials Science and Process Technology)

by Krishna Seshan

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The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition tec
  • ISBN13 9781482269680
  • Publish Date 1 February 2002 (first published 1 January 2001)
  • Publish Status Active
  • Publish Country GB
  • Publisher Taylor & Francis Ltd
  • Imprint CRC Press
  • Format eBook
  • Pages 72
  • Language English