CMOS - MEMS (Advanced Micro and Nanosystems, #4)

Henry Baltes (Editor), Oliver Brand (Editor), Gary K. Fedder (Editor), Christofer Hierold (Editor), Jan G. Korvink (Editor), and Osamu Tabata (Editor)

0 ratings • 0 reviews • 0 shelved
Book cover for CMOS - MEMS
Shelve It

Bookhype may earn a small commission from qualifying purchases. Full disclosure.

This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of
MEMS is covered from all angles.

The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first
place, rather than having a hybrid solution.
  • ISBN13 9783527675067
  • Publish Date 26 March 2013 (first published 15 February 2005)
  • Publish Status Active
  • Publish Country GB
  • Imprint Wiley-VCH Verlag GmbH