Intrinsic Point Defects, Impurities, and Their Diffusion in Silicon (Computational Microelectronics)

by Peter Pichler

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Book cover for Intrinsic Point Defects, Impurities, and Their Diffusion in Silicon

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This book contains the first comprehensive review of intrinsic point defects, impurities and their complexes in silicon. Besides compiling the structures, energetic properties, identified electrical levels and spectroscopic signatures, and the diffusion behaviour from investigations, it gives a comprehensive introduction into the relevant fundamental concepts.

  • ISBN10 3709105986
  • ISBN13 9783709105986
  • Publish Date 2 June 2004
  • Publish Status Withdrawn
  • Out of Print 18 October 2014
  • Publish Country US
  • Imprint Springer My Copy UK
  • Format Paperback (US Trade)
  • Pages 588
  • Language English