Computational Microelectronics
1 total work
Intrinsic Point Defects, Impurities, and Their Diffusion in Silicon
by Peter Pichler
Published 2 June 2004
This book contains the first comprehensive review of intrinsic point defects, impurities and their complexes in silicon. Besides compiling the structures, energetic properties, identified electrical levels and spectroscopic signatures, and the diffusion behaviour from investigations, it gives a comprehensive introduction into the relevant fundamental concepts.