Artech House Microelectromechanical Systems (Mems)

1 total work

MEMS Mechanical Sensors

by Steve P. Beeby, Graham Ensel, Michael E. Kraft, and Neil M White

Published 30 April 2004

The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.