The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.
- ISBN10 1580535364
- ISBN13 9781580535366
- Publish Date 30 April 2004
- Publish Status Active
- Publish Country US
- Imprint Artech House Publishers
- Format Hardcover
- Pages 284
- Language English