Proceedings of SPIE

2 total works

Device and Process Technologies for MEMS and Microelectronics II

by Jung-Chih Chiao, Lorenzo Faraone, H. Barry Harrison, and Andrei M. Shkel

Published 1 January 2001

Advanced Microelectronic Processing Techniques

by H. Barry Harrison, Andrew Thye Shen Wee, and Subhash Gupta

Published 31 March 2001