Device and Process Technologies for MEMS and Microelectronics II (Proceedings of SPIE, v. 4592)

by Jung-Chih Chiao, Lorenzo Faraone, H. Barry Harrison, and Andrei M. Shkel

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  • ISBN10 0819443220
  • ISBN13 9780819443229
  • Publish Date 1 January 2001
  • Publish Status Active
  • Publish Country US
  • Imprint SPIE Press
  • Edition New ed.
  • Format Paperback
  • Pages 550
  • Language English