Materials Science and Process Technology

1 total work

Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon

by Krishna Seshan

Published 1 January 2001

The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition tec