Semiconductors and Semimetals

1 total work

Hydrogen in Semiconductors

Published 1 January 1991

Hydrogen plays an important role in silicon technology, having a profound effect on a wide range of properties. Thus, the study of hydrogen in semiconductors has received much attention from an interdisciplinary assortment of researchers. This 16 chapter volume provides a comprehensive review of the field, including a discussion of hydrogenation methods, the use of hydrogen to neutralize deep levels, shallow acceptors and shallow donors in silicon, vibrational spectroscopy, and hydrogen-induced defects in silicon. In addition to this detailed coverage of hydrogen in silicon, chapters are provided that discuss hydrogen-related phenomena in germanium and the neutralization of defects and dopants in III-V semiconductors. Features and benefits include in-depth coverage of hydrogen in silicon available in a single source, an extensive chapter devoted to the neutralization of defects in III-V semi-conductors, and both experimental and theoretical studies to provide a comprehensive reference.