This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.
- ISBN10 3110712539
- ISBN13 9783110712537
- Publish Date 8 November 2021
- Publish Status Active
- Publish Country DE
- Imprint De Gruyter
- Format eBook
- Pages 113
- Language English
- URL https://degruyter.com/isbn/9783110712537