This text focuses on the design, modelling, fabrication, operation and applications of microelectromechanical devices, machines and systems which are constructed on the micrometre to millimetre scale.
- ISBN10 078034412X
- ISBN13 9780780344129
- Publish Date 28 February 1998
- Publish Status Active
- Publish Country US
- Imprint I.E.E.E.Press
- Format Paperback
- Pages 750
- Language English