For device processing engineers this book explains the possible origins of problems that arise during material processing, based on defect physics. It also provides a discussion of defects and their behaviours in epitaxial growth.
- ISBN10 1560329254
- ISBN13 9781560329251
- Publish Date 15 January 2002
- Publish Status Out of Print
- Out of Print 21 December 2011
- Publish Country GB
- Imprint Taylor & Francis Ltd
- Format Hardcover
- Pages 379
- Language English