Mems Reliability For Critical and Space Applications

by Lawton

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A selection of scientific papers on the reliability of microelectromechanical systems (MEMS) for critical and space applications.
  • ISBN13 9780819434777
  • Publish Date 1 August 1999
  • Publish Status Out of Print
  • Out of Print 14 September 2016
  • Publish Country US
  • Imprint SPIE Press
  • Format Paperback
  • Pages 176
  • Language English