Microelectromechanical sytems (MEMS) applications in RF and microwave electronics are revolutionizing wireless communications. This text provides a comprehensive explanation of the fabrication and fundamental physics of MEMS and their applications in electronic communication systems. The book integrates circuit fabrication technology, device design-oriented materials, mechanical and microwave considerations, and RF/microwave electronics to give engineers and managers a clear understanding of the potential and limitations of MEMS in electronic communications.
- ISBN10 089006282X
- ISBN13 9780890062821
- Publish Date 31 March 1999
- Publish Status Active
- Publish Country US
- Imprint Artech House Publishers
- Format Hardcover
- Pages 232
- Language English