Microsystems technology encompasses microfabrication techniques and uses a range of expertise from specific design to customized packing and a large range of collective fabrication procedures. This work covers the subject from various aspects, including surface and bulk micromachining, sensors, LIGA microfabrication techniques, electrostatically actuated microactuators and wafer bonding methods. This is followed by a series of case studies dealing with major applications such as RF-MEMS, MOEMS and magnetic microsystems. Finally, the contributions focus on packaging, testing, reliability and failure analysis techniques and CAO tools and methods.
- ISBN10 1903996473
- ISBN13 9781903996478
- Publish Date 24 September 2003
- Publish Status Out of Print
- Out of Print 25 May 2011
- Publish Country GB
- Publisher Kogan Page Ltd
- Imprint Kogan Page Science
- Format Hardcover
- Pages 320
- Language English