Ion Implantation in Semiconductors, Silicon and Germanium

by J W Mayer

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  • ISBN10 0124808506
  • ISBN13 9780124808508
  • Publish Date 1 January 1970
  • Publish Status Out of Print
  • Out of Print 10 January 1992
  • Publish Country US
  • Publisher Elsevier Science Publishing Co Inc
  • Imprint Academic Press Inc
  • Format Hardcover
  • Pages 280
  • Language English