This text provides coverage of the models, governing equations and numerical techniques suitable for process simulation. It concentrates on such areas as chemical vapour deposition, metal-organic chemical vapour deposition, plasma processing, rapid thermal processing and crystal growth, as well as defining the basic principles of transport phenomena, gas phase and surface reactions in electronics materials processing. In addition, it explains how to apply practical numerical techniques used in process simulation, and presents the numerical methods necessary to produce simulation codes. The work is intended for those new to the field of process and equipment simulation in electronics materials processing, and also for the experienced modeller. It also contains coverage suitable for graduate students in materials science, and chemical, mechanical and electrical engineering.
- ISBN10 0890067074
- ISBN13 9780890067079
- Publish Date 31 August 1994
- Publish Status Active
- Out of Print 1 September 2014
- Publish Country US
- Imprint Artech House Publishers
- Edition Unabridged edition
- Format Hardcover
- Pages 363
- Language English