Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.
- ISBN13 9780128178508
- Publish Date 21 October 2020
- Publish Status Active
- Publish Country US
- Imprint Elsevier Science Publishing Co Inc
- Format Paperback
- Pages 448
- Language English