This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.
- ISBN10 3527613005
- ISBN13 9783527613007
- Publish Date 13 December 2007
- Publish Status Unknown
- Publish Country DE
- Imprint Wiley-VCH Verlag GmbH
- Pages 512
- Language English