The practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes, this reference explains key concepts and important analytical techniques. It discusses films and interfaces, electronic passivation of semiconductor-dielectric film interfaces, the Si-SiO2 interface, and other MOSFET interfaces, and includes figures, charts, exercises, and examples of applications. This is the ideal guide to help professionals in the electronics industry get up to speed fast. It is also an excellent text for upper-level graduate and undergraduate students.
- ISBN10 0470174471
- ISBN13 9780470174470
- Publish Date 11 March 2008
- Publish Status Active
- Publish Country US
- Imprint Wiley-Interscience
- Format Hardcover
- Pages 536
- Language English