Fundamentals of Microfabrication and Nanotechnology

by Marc J. Madou

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  • ISBN10 143980785X
  • ISBN13 9781439807859
  • Publish Date 24 April 2009
  • Publish Status Active
  • Publish Country US
  • Publisher Taylor & Francis Inc
  • Imprint CRC Press Inc
  • Edition 3rd Revised edition
  • Format Paperback (B-Format (198x129 mm))
  • Language English