This book covers the chemistry of the major processes involved in the manufacture of integrated circuits. The authors describe all the major processes in use, together with some interesting processes which are currently being developed and hold future promise. Each chapter covers the current state of knowledge of the underlying chemistry of a particular process, and identifies areas of uncertainty requiring further research.
- ISBN13 9780216920057
- Publish Date 28 February 1989
- Publish Status Active
- Publish Country NL
- Publisher Springer
- Imprint Kluwer Academic Publishers
- Edition 1989 ed.
- Format Hardcover
- Pages 426
- Language English