Pore Characterization of Ultralow-K Dielectric Thin Films Using Positronium Annihilation Spectroscopy

by Ming Liu

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  • ISBN10 1243578173
  • ISBN13 9781243578174
  • Publish Date 1 September 2011
  • Publish Status Unknown
  • Publish Country US
  • Imprint Proquest, Umi Dissertation Publishing
  • Format Paperback (US Trade)
  • Pages 270
  • Language English